Investigation into the role of cold atmospheric plasma on the precision grinding of RB-SiC ceramic at room temperature

RB-SiC ceramic is one of the most important and useful materials as optical precision elements in many scientific research fields. In this paper, a novel cold atmospheric plasma (CAP) process via oxygen (O2), which based on grinding surface technology to modify at room temperature for with combination oxidation modification, proposed. To identify performance proposed method modification fabrication process, test was conducted. reveal fundamental issue ceramic, surface-modified layer mathematical model trajectory point P(Ai, Aj) analysis were conducted investigate effect composite force mechanism material removal presence oxidation. As result included kept constant during self-adaption-grinding avoid deviation caused by second particle entry. summary, we provide significant plasma-precision compound toward establishment basic theory analyzing experimental design computation. The technical difficulties modified solved. single-precision schematic diagram wheel: (a) Traditional process; (b) Cold (O2) process.